Semiconductor Evaporation Tantalum Heating Element

Grade: RO5200 RO5400
Melting point: 2980℃
Boiling point: 5370℃
Density: 16.6g/cm³
Purity: ≥99.95%
Implementation standard: ASTM B708 ​​GB/T3629-2006
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Description

Semiconductor heaters are devices that use the electrothermal effect of semiconductor materials to generate heat. Compared with traditional resistance heaters, semiconductor heaters have higher efficiency and more precise temperature control capabilities.


Due to the high temperature resistance, elongation effect and corrosion resistance of tantalum materials, semiconductor heaters made of tantalum plates are also called tantalum heaters. Tantalum heaters are mainly used to heat parts of semiconductor manufacturing equipment.


Main features:


High efficiency: Semiconductor heaters have high electrothermal conversion efficiency and can convert most of the electrical energy into thermal energy, reducing energy waste.


Fast response: Semiconductor materials have a fast response speed and can reach the required temperature in a short time.


Accurate temperature control: By adjusting the current or voltage, accurate temperature control can be achieved, which is suitable for occasions where constant temperature or small temperature changes are required.


Small size and light weight: Semiconductor heaters are usually small in size and suitable for integration into various equipment.


Environmental protection: Semiconductor heaters do not produce harmful gases or substances, which meets environmental protection requirements. Energy concentration makes the evaporation process more stable and the evaporation effect more uniform.


Manufacturing process:

 

Tantalum plate--cutting--annealing--spinning--finishing--cleaning--testing--packaging

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