What is Tantalum Target?
Tantalum target is a material made of high-purity tantalum metal or tantalum alloy, which is mainly used in various thin film deposition processes. Tantalum target is known for its excellent corrosion resistance, high melting point and biocompatibility, and is widely used in many high-tech fields such as electronics, semiconductors, anti-corrosion coatings and medical equipment.
Physical and chemical properties
The main physical properties of tantalum target include:
Melting point: 3290K (3017°C)
Boiling point: 5731K (5458°C)
Density: 16.68g/cm³
Hardness: high hardness, ductility and corrosion resistance
Chemical stability: Tantalum does not react with aqua regia, suitable for the manufacture of chemical equipment and medical devices
Preparation method
The preparation method of tantalum target usually includes the following steps:
1. Powder metallurgy: sodium thermal reduction method is used to produce tantalum powder with a particle size of 2-3 microns.
2. Cold isostatic pressing: cold isostatic pressing is performed on tantalum powder in a latex package, with a pressure greater than 200 MPa and a holding time greater than 20 min.
3. Sintering: sintering is performed under conditions of a vacuum greater than 1*10^-2 MPa and a temperature greater than 2400°C, with a holding time greater than 1.5 h.
4. Rolling and heat treatment: the sintered tantalum billet is rolled and heat treated to obtain a tantalum target.
Application areas
Tantalum targets are widely used, mainly including:
1. Electronics and semiconductor industries: used as barrier layer materials in integrated circuit manufacturing, especially in copper interconnect technology, where tantalum's high melting point and low resistance make it an ideal choice.
2. Anti-corrosion coating: Due to its excellent corrosion resistance, tantalum is used to coat chemical equipment and metal surfaces exposed to extreme environments to extend the service life of the equipment.
3. Optical and optoelectronic films: Tantalum targets can be used to make films with specific optical properties and are widely used in optical devices, displays and sensors.
4. Medical devices: Tantalum has good biocompatibility and is suitable for coating medical implants such as bone plates and joint prostheses to reduce human rejection reactions.